diff --git a/CMakeLists.txt b/CMakeLists.txt
index e216a4a3..8896dfd7 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -324,15 +324,15 @@ endif()
 # Determine architecture
 set(MI_OPT_ARCH_FLAGS "")
 set(MI_ARCH "unknown")
-if(CMAKE_SYSTEM_PROCESSOR MATCHES "x86|i[3456]86" OR CMAKE_GENERATOR_PLATFORM MATCHES "x86|Win32")
+if(CMAKE_SYSTEM_PROCESSOR MATCHES "^(x86|i[3456]86)$" OR CMAKE_GENERATOR_PLATFORM MATCHES "^(x86|Win32)$")
   set(MI_ARCH "x86")
-elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "x86_64|x64|amd64|AMD64" OR CMAKE_GENERATOR_PLATFORM STREQUAL "x64")
+elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "^(x86_64|x64|amd64|AMD64)$" OR CMAKE_GENERATOR_PLATFORM STREQUAL "x64")
   set(MI_ARCH "x64")
-elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "aarch64|arm64|armv8.?" OR CMAKE_GENERATOR_PLATFORM MATCHES "ARM64")
+elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "^(aarch64|arm64|armv8.?)$" OR CMAKE_GENERATOR_PLATFORM STREQUAL "ARM64")
   set(MI_ARCH "arm64")
-elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "arm")
+elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "^(arm|armv[34567])$")
   set(MI_ARCH "arm32")
-elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "riscv")
+elseif(CMAKE_SYSTEM_PROCESSOR MATCHES "^(riscv|riscv32|riscv64)$")
   if(CMAKE_SIZEOF_VOID_P==4)
     set(MI_ARCH "riscv32")
   else()